Highly integrated construction and compact design make the axis versatile for high-precision positioning tasks with limited installation space. Despite its compactness, the axis offers good load capacities and tilting moments. It can also be installed in upright position or lying on its side. The linear axis is designed for small to medium-sized strokes with loads up to 30 N. The hard-coated aluminum slide is dynamically driven by a Tecnotion UC3 motor. Preload is achieved by magnet groups. The axis is equipped with an incremental measuring system from Heidenhain (LIK 21). The chrome steel rail is available in 2 standard lengths, deviating lengths on request.
Applications: Inspection technology, non-contact 2D measurement, sensor and camera positioning for inspection, electronics and PCB manufacturing, AOI (automatic optical inspection), automation processes.
In general: Applications with high demands on dynamics, precision, repeatability, smooth scan movements, short settling times.
Compact design, high load capacity and very high positioning accuracy are the outstanding features of the linear axis EZ-2352-094. The air bearing axis is designed for small to medium strokes with loads up to 150 N. The slide made of hard-coated aluminum is dynamically driven by an ironless synchronous motor (Tecnotion UM6). Preload is achieved by magnet groups. In the standard version, the axis is equipped with an absolute measuring system from Heidenhain (LIC411). The chrome steel rail is available in 3 standard lengths, different lengths on request. For the realization of simple cross tables, two axes can be stacked on top of each other.
Applications: Electronics manufacturing, PCB manufacturing, inspection technology, non-contact 2D measurement, sensor and camera positioning for inspection, AOI (automatic optical inspection), automation processes.
In general: Applications with high demands on dynamics, precision, repeatability, smooth scan movements, short settling times.
The EZ-2542 Linear Axis is designed for loads of up to 200 N. A key feature of the axis is the angular arrangement of the air-bearing surfaces, which enables the very compact design. The slide is magnetically preloaded and dynamically driven by a Tecnotion UM9 N linear motor. The standard version uses an incremental measuring system from RSF, absolute measuring devices from Renishaw or Heidenhain (LIC) are optionally available. The aluminum rail (hard anodized) is available in 3 standard lengths, customized lengths can be supplied upon request. To realize simple cross tables, two axes can be stacked on top of each other.
Applications: Electronics manufacturing, PCB manufacturing, inspection technology, non-contact 2D measurement, sensor and camera positioning for inspection, AOI (automatic optical inspection), automation processes.
In general: Applications with high demands on dynamics, precision, repeatability, uniform scanning movements and short settling times.
The EZ-4360 linear axis was originally designed for use in measuring machines and for moving optical components. The almost 300 mm long slide travels on the granite with bearings located far to the outside, allowing the transmission of high tilting moments. The solid granite rail and the ZeroMetTM (Renishaw) scale guarantee good repeatability even with moderate temperature fluctuations. The slide is designed for payloads of up to 20 kg. Its surface offers plenty of space for customer-specific structures and sensors. The axis is driven by a linear motor (Tecnotion UL6). Due to the magnetic preload, the axis can also be operated vertically. An incremental measuring system (Renishaw TonicTM) is installed in the standard version. Deviating strokes can be realized on request.
Applications:Electronics manufacturing, PCB manufacturing, inspection technology, non-contact 2D measurement, sensor and camera positioning for inspection, AOI (automatic optical inspection), automation processes.
In general: Applications with high demands on dynamics, precision, repeatability, smooth scan movements, short settling times.
The EZ-2310 linear axis is equipped with a 900 mm long slide, which is magnetically preloaded and runs on a stable granite base. The linear axis is designed to operate precisely even under high loads and offers plenty of space for customer-specific setups and sensor systems. A powerful linear motor from Tecnotion (UX12) ensures dynamic slide movement. In the standard version, the axis is equipped with an incremental measuring system (RSF). Deviating strokes can be realized on request. Deviating strokes can be realized on request.
Applications: Inspection technology, sensor and camera positioning for inspection, electronics and PCB manufacturing, AOI (automatic optical inspection), automation processes.
In general: Applications with high demands on dynamics, precision, repeatability, smooth scan movements.
The linear axis consists of a guide rail and a slide. The slide is preloaded by magnetic force and, apart from a small Newtonian force, moves without friction. Due to the friction-free movement and the compact design the axis is ideal for beam guidance. The air-bearing axis is designed for small to mediumsized strokes with loads of up to approx. 500 g. The guide rail is made of stainless steel, the slide is made of hardcoated aluminium. The axis shown in this data sheet is without drive and measuring system, but can easily be equipped with a voice coil motor and measuring system. The linear axis can be extended by a second, mirrorinverted slide. The guide rail can be adjusted in length.
Applications: Beam guidance, positioning of optical components, mirror positioning, AOI (automatic optical inspection) inspection technology, photovoltaic production.
Compact design, high load capacity and very high positioning accuracy are the outstanding features of the linear axis EZ-2352-094V. The air bearing axis is designed for small to medium strokes with loads up to 100 N. A pneumatic, air-bearing cylinder serves as a static counterweight. The slide made of hard-coated aluminum is dynamically driven by an ironless synchronous motor (Tecnotion UM6). The preload is achieved by magnet assemblies. In the standard version, the axis is equipped with an absolute measuring system from Heidenhain (LIC4). The linear axis is available with strokes of 20/40/60 mm, other lengths are possible on request, as well as a configuration with laterally arranged counterweight cylinders. For the realization of simple cross tables, two axes can be stacked on top of each other.
Applications: Electronics manufacturing, PCB manufacturing, inspection technology, non-contact 2D measurement, sensor and camera positioning for inspection, AOI (automatic optical inspection), automation processes.
In general: Applications with high demands on dynamics, precision, repeatability, smooth scan movements, short settling times.
With the EZ-5504 focus axis, EITZENBERGER has implemented a completely new and innovative axis concept. Compact dimensions of 99 x 99 x 80 mm (L x W x H) and a central, continuous opening of approx. 35 mm for optical components are the external features. The slip-stick-free air bearing enables maximum precision and repeatability in the nanometer range over the entire stroke range of 18 mm. In addition to the extremely low positioning error, the low tilting error of the axis is particularly noteworthy. The focus axis is permanently magnetically weight-compensated and designed for a payload of 250 g. The weight compensation is adjustable for masses from 50 to 300 g. The focus axis can be moved dynamically via a voice coil motor. A Renishaw measuring head with a resolution of 1 nm and a BiSS interface is used as the measuring system.
Areas of application: The focus axis is suitable for high-precision applications in the fields of lithography, mask exposure, scanning applications or generally for positioning optics and sensors. Thanks to its compact dimensions and low system weight, the axis can be easily integrated into many applications. The air bearing and the materials used predestine the focus axis for clean room applications.
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