STACIS 4

STACIS® 4 is the most advanced active vibration isolation system commercially available. Employing inertial vibration sensors,
sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by
continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion. The all
new STACIS 4 builds upon the success of our proven STACIS technology, which is used by 9 of the top 10 semiconductor
manufacturers worldwide.

STACIS II

STACIS® III is a flexible advanced active vibration isolation system. Employing advanced inertial vibration sensors,
sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by
continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion.

STACIS IIIc

STACIS IIIc is a compact version of ours STACIS III active piezoelectric vibration cancellation system. It offers the same
outstanding vibration isolation performance at a reduced height. STACIS IIIc is ideal in situations where there is no, or very low,
raised floor, where the height of the standard STACIS III system would make the instrument too tall. In a 3-isolator
configuration isolator height is less than 60% of the regular STACIS III height. In systems with more than 3 isolators the height
will be between 60 and 70% depending on payload setup. See specifications below for details.

STACIS Quiet Island

Semiconductor manufacturing factories (fabs), Nanotechnology Centers, Nanofabs, and other precision manufacturing and
research facilities often incorporate cleanrooms with a system of raised false floors to accommodate complex facilities
requirements (plumbing, electrical cables, gas piping, etc.) and to maintain strict cleanliness standards. Such floors present a
challenge to the installation of vibration-sensitive production, inspection, and metrology equipment. The raised floors cannot
provide the necessary quiet vibration environment for such tools. TMC’s Quiet Island® is an innovative solution that replaces a
section of the raised floor area with a “Quiet Island” anchored to the sub-floor below. The Quiet Island consists of a cleanroom
compatible platform top combined with an application and site specific support structure.

SEM-Base

SEM-Base® VI is the next generation in STACIS active piezoelectric vibration cancellation. SEM-Base VI is designed to support
all commercial Scanning Electron Microscopes (SEMs), as well as many Focused Ion Beam (FIB) and Small Dual Beam
instruments. SEM-Base VI provides improved vibration isolation performance, a faster more robust controller, and an
advanced graphical user interface (GUI). SEM-Base VI will enable more labs and facilities to achieve the level of floor vibration
required to satisfy the specifications of the tool manufacturer

STACIS Floor Platform

For conventional lab floors, isolating building floor vibration from large, tall tools presents an ergonomic challenge. Placing the
isolators directly beneath the tool may raise the tool to an impractical height. Furthermore, conventional air isolators are
unstable when placed close together under a tall, top-heavy payload.
TMC’s STACIS Floor Platforms solve this dilemma. By combining our Stainless Steel Platforms with a unique “lifthood” design,
our isolators “cradle” the platform allowing the tool to be lifted a minimal distance above the floor. And, because the isolators
are not integrated into the platform, the platform may be custom designed to match the tool footprint or any desired shape.