Micro-g® Air Isolators for In-Tool Applications

TMC pneumatic vibration isolation systems are the solution of choice for tool designers seeking superior vibration isolation of
ultra-precision instruments. TMC now offers our industry standard Gimbal Piston®, MaxDamp®, and UltraDamp™ isolators in a
convenient range of capacities, damping levels and leveling versions to suit a wide-range of applications.
Ideal for OEM applications, these isolators are offered in a modular, interchangeable, and upgradable design. And, to ensure
you specify a version that will meet your settling time and isolation requirements, TMC engineers can model your configuration
with our “Moving Stage Application Model.”

Electro-Damp® II Active Air Vibration Cancellation

Electro-Damp® is the first commercial active vibration isolation system designed specifically to increase throughput,
resolution, and yield in semiconductor manufacturing applications. The Electro-Damp II is a complete redesign of the original
system, adding modularity, digital control, feedforward, high-force/high-clearance actuators, and multiple digital user
interfaces specifically designed for use in OEM applications such as microlithography, inspection, and metrology tools.

STAGE-Base

TMC continues to apply advancing technology to develop new solutions to the challenging demands that semiconductor tools
place on their vibration isolation systems. Stage-Base 450 is specifically designed to be the primary, internal, piezo-based
vibration cancellation system for advanced semiconductor tools which incorporate high-precision motorized X-Y stages.
While such tools require extremely efficient vibration cancellation, just as critical, they require that payload motion induced by
the stage settle very quickly to maximize tool throughput
Stage-Base applies TMC piezo technology to rapidly settle stage induced payload motion to increase tool throughput. It does
so while providing very high attenuation of low frequency floor vibration.