With its basic dimensions of 115 x 115 mm, the EZ-0675 is a very compact air bearing rotary table. The EZ-0675 is particularly suitable for precise positioning tasks in measuring machines or, mounted on linear axes, for aligning components or optical devices when being placed on linear axes. The turntable can be screwed on from above or below via four through holes with M6 and M4 threads. The integrated measuring system (Numerik RIK4) with 10,000 lines can be supplied either with interpolation (RS422 in 5, 10, 50 or 100-fold) or without (1Vss). Alternatively, the rotary table is also available as HT (High Torque) version. With the HT version, the overall height increases from 49 mm to 60 mm. Due to the magnetic preload, the EZ-0675 is self-locking when the supply air is turned off. It can be installed horizontally and vertically in any orientation. The materials used and the absence of lubricants qualify the rotary table for operation in clean room environments.
Applications: High-precision positioning and measuring systems, inspection technology, testing systems, calibration systems, optical alignment, applications with high demands on synchronization and/or repeatability of positioning.
The EZ-0275 is a long-proven, direct-driven rotary table of medium size. Due to the torque motor (IDAM RMF 2- or 3-phase) dynamic applications up to 660 rpm can be realized. The rotary table is particularly suitable for applications that require very precise rotary motion and high repeatability. The measuring system (Numerik Jena RIK4) with 18,000 lines can optionally be supplied with interpolation factors of 5, 10, 50 or 100. Lower interpolation values allow for higher speeds, while higher interpolation values improve repeatability. The rotor is magnetically preloaded and clamps to the housing when the air supply is switched off, ensuring it remains fixed in position. There are no restrictions regarding the installation orientation. Due to the materials used and the fact that air bearings are generally operated without lubricants, the rotary table is suitable for use in clean rooms. The maximum permissible payload is 600 N.
Applications: High-precision positioning and measuring systems, inspection technology, testing systems, calibration systems, optical alignment, applications with high demands for synchronization and/or repeatability in positioning.
Due to its high load capacity (up to 2,200 N axial), the EZ-0570 rotary table is particularly suitable for high- precision positioning of heavy loads of up to 40 kg. Among its various applications, the rotary table is preferably used for measuring tasks with non-contact measuring systems. Equipped with a powerful iron- core torque motor, it can also handle dynamic applications. To further reduce axial and radial error motion, the rotary table can be operated with an ironless motor. The measuring system (Numerik RIK4) features 18,000 lines and can optionally be supplied with interpolation factors of 5, 10, 50 or 100. The rotor is magnetically preloaded and is clamped to the housing when the air supply is switched off, ensuring it remains fixed in position. There are no restrictions regarding the installation orientation. Due to the materials used and the fact that air bearings are generally operated without lubricants, the rotary table is suitable for use in clean rooms.
Applications: High-precision positioning and measuring systems, inspection technology, testing systems, applications with high demands on synchronization and/or repeatability of positioning.
The EZ-0779 rotary table with high axial load capacity and axial/radial error motion below 100 nm was originally developed for use in wafer processing; it is suitable for a wide range of applications. The direct- drive rotary table is equipped with a powerful water- cooled torque motor. Optionally, a rotary feedthrough with up to 6 air/vacuum channels can be integrated. The measuring system (Numerik Jena RIK4) with 18,000 lines can optionally be supplied with an interpolation factor of 5, 10, 50 or 100. Low interpolation values allow higher speeds, higher interpolation values increase the repeatability. There are no restrictions regarding the installation position.
Applications: Wafer grinding, wafer thinning, test systems, applications with high requirements on synchronization and/or positioning accuracy
With an axial error movement of < 30 nm and a radial error movement of < 50 nm, the EZ-RP201 rotary table series meets the highest requirements for concentricity. Due to the special H-design and an optimized bearing layout, a particularly high axial load capacity and stiffness are achieved. The stainless steel turntables can be driven via an externally flanged motor or via a belt pulley.
Applications: As drive/bearing in the fields of precision turning, polishing, grinding, wafer grinding; for applications with high demands on concentricity.
The EZ-0778 passive rotary table features high axial and radial load capacity and stiffness. Due to the low error motion of < 100 nm, the table is ideal for rotary motion in high-precision machining processes. The air-bearing rotary table can be driven by an external motor via a bellows coupling and pulley. On request, these can be pre-assembled at the factory. There are no restrictions regarding the installation position.
Applications: As drive/bearing in the fields of precision turning, polishing, grinding, wafer grinding; for applications with high demands on concentricity.
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