In the design of the XY Stage EZ-0117, particular emphasis was placed on a cost-conscious design combined with high accuracy requirements. The treads for the air bearings are covered with bellows that prevent the ingress of particles, making the EZ-0117 particularly suitable for particle-loaded applications. Despite being equipped with bellows, a high level of positioning accuracy is achieved. Iron-core synchronous motors allow acceleration of up to 10 m/s2 and a travel speed of up to 1 m/s. The machine bed is made of granite. An interface plate is provided on the side of the cross table for the transmission of energy, signals and media. Both axes can be supplied separately with electrical and pneumatic energy. The end position is detected by inductive sensors. The XY Stage is available in 2 sizes, with a travel range of 250 x 450 mm or 250 x 800 mm. Other dimensions or extensions of the two-axis system are possible on request.
Applications: Positioning, scanning, exposure, laser engraving, laser processes in general.
The EZ-0714 gantry stage is designed for positioning tasks with high accuracy requirements, making it particularly versatile in use. Due to the optional equipment with bellows, the stage is suitable for particle-laden processes as well as for laser machining processes. The coplanar arrangement of the axes and the gantry design ensure very high repeatability and positioning accuracy. All air bearings are magnetically preloaded. Cable management is designed to minimize mechanical interference. The iron-core synchronous motors enable an acceleration of up to 10 m/s2 and a travel speed of up to 1 m/s. The machine bed is made of granite. Extention by a Z.Axis is possible. The XY Stage is available in 2 sizes, with a travel range of 500 x 500 mm or 500 x 600 mm.
Applications: Positioning, scanning, exposure, laser engraving, laser processes in general.
The EZ-GS0760 wafer stage has been developed for high-dynamic processes, such as laser fuse cutting. It offers excellent repeatability, optimal accuracy, and exceptional dynamic performance.
Built-in features:
Applications: Fuse cutting, high-precision positioning, scanning, and on-the-fly laser processes
EZ-0730 High Precision Impulse Decoupled Stage
Intelligent design gives the EZ-0730 stage maximum rigidity and excellent repeatability, minimizing axis crosstalk.
Built-in features:
The machine bed is made of granite. The axes can be customized according to the customer’s requirements.
Applications: High-precision positioning, scanning, exposure, laser engraving, laser processes in general.
EZ-0715 High Precision Gantry Stage
The EZ-0715 Gantry Stage is designed for high precision applications. Incremental measuring systems (Heidenhain LIP6 G0) and an optimized design allow a positioning accuracy of ± 250 nm and a repeatability of ± 25 nm for the single axes. The vacuum-preloaded slide and optimized mass distribution enable high rigidity in the smallest installation space. Ironless motors enable an acceleration of up to 10 m/s2 and a travel speed of up to 1 m/s. The end position is detected by inductive sensors. The slides are supplied with energy separately via symmetrically attached drag chains. The machine bed of the Gantry Stage is made of granite. Both axes can be customized. The XY system can be expanded to include a Z- and/or C-Axis.
Applications: High-precision positioning tasks, scanning, exposure, laser engraving, laser processes in general.
The EZ-0745 air-bearing ZC-axis is intended for integration into an XY-stage (e.g. EZ-0715). Due to the highly integrated design, only a low overall height of approx. 138 mm is required. The rotation angle is limited to ± 3°. A high repeatability of ± 1.5 μrad enables very precise alignment of the substrate. The Z-axis is secured against rotation via 2 air bearing pads and is dynamically driven by 2 opposing voice coils. An air-bearing pneumatic cylinder is integrated for weight decoupling. An individual, customer-specific adjustment of the Z-stroke is possible.
Applications: High-precision positioning tasks, scanning, exposure, laser engraving, laser processes in general.
The ZC Motion System EZ-4360 was developed as kinematics for measuring rotationally symmetrical components. The test object is positioned and rotated on a rotary table while the measuring head is moved vertically via a high-precision air-bearing axis. The linear axis is weight-decoupled via a friction-free air-bearing cylinder and can carry a weight of up to 7 kg. An important feature is the high-precision adjustment of the parallelism of the linear axis to the rotary axis. The machine bed is made of granite. By resting the granite on air springs, excellent decoupling from the ground is achieved.
Applications: High-precision positioning tasks, measurement of rotationally symmetrical bodies
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