Hybrid Hexapod

Description

ALIO brings a revolutionary new approach to 6D motion. ALIO Hybrid Hexapod™ Systems introduce increased rigidity to the linkages and maintain sub-micron positioning which together provides the most precise positioning possible.

  • Bidirectional Repeatability to ±80nm.
  • Accuracy<1µm.
  • Velocity up to 0.5 m/s, 180°/s Tip/Tilt,>720°/s Theta-Z.
  • Load Capacity to 30 kg.
  • Unlimited XY travel. Continuous 360° theta-Z rotation,±20° tip/tilt, and up to 106 mm vertical travel.