ALIO brings a revolutionary new approach to 6D motion. ALIO Hybrid Hexapod™ Systems introduce increased rigidity to the linkages and maintain sub-micron positioning which together provides the most precise positioning possible.
- Bidirectional Repeatability to ±80nm.
- Velocity up to 0.5 m/s, 180°/s Tip/Tilt,>720°/s Theta-Z.
- Load Capacity to 30 kg.
- Unlimited XY travel. Continuous 360° theta-Z rotation,±20° tip/tilt, and up to 106 mm vertical travel.