EssentOptics presents an approach for polarization-resolved metrology of optical coatings in the deep ultraviolet (DUV) range, addressing measurement challenges related to accurate separation of S- and P-polarized components.
Characterization of optical coatings in the DUV range remains technically demanding, particularly at wavelengths such as 193 nm, 213 nm, and 248 nm, which are widely used in semiconductor inspection, laser micromachining, and advanced optical systems. Reliable measurement under these conditions requires accurate control of polarization and angle of incidence.
The EssentOptics approach is based on its PHOTON RT spectrophotometer platform, enabling broadband transmission and reflection measurements with variable angle and polarization control. This supports evaluation of coating performance under conditions that are closer to real operating environments.
Enhanced system configurations extend measurement capabilities into the deep UV down to approximately 185 nm, with automated acquisition of angle- and polarization-resolved data. The system enables separation of S- and P-polarization components and supports repeatable measurement workflows for coating characterization.
The measurement approach is designed to address limitations of conventional methods, where coatings are often evaluated at a single angle or without polarization control. By enabling angle-resolved and polarization-resolved measurements across a broad spectral range, the system supports more detailed analysis of coating behavior.
Key capabilities
- Polarization-resolved measurement of optical coatings (S and P components)
- Operation in the deep UV range down to ~185 nm
- Variable angle of incidence for angle-resolved characterization
- Broadband transmission and reflection measurements
- Automated measurement workflows with high repeatability
Typical applications
- Semiconductor inspection optics
- Laser micromachining and processing systems
- Optical coatings for DUV laser sources
- Scientific and metrology applications
- Advanced optical components requiring polarization-sensitive characterization
👉 Learn more about DUV metrology solutions on the EssentOptics website
👉 Contact us for pricing, availability, and technical support
