Nanopositioning and Nanomeasuring Machine



  • 3D-multisensor positioning and measuring system with the highest accuracy

  • Customized probe systems, e.g. laser focus sensors LFS-series, scanning tunnelling and scanning atomic force microscopes, white light interferometer, 3D-micro probes

  • Operation modes:

  1. dynamic positioning system

  2. measuring system operating in either continuous-scan mode or single-step mode

  • Control of NNM-1 employs an easy to use script language running on the host PC

Technical Data:

  • Measuring and positioning range: 25 mm x 25 mm x 5 mm
  • Resolution: 0.1 nm

Data Sheet

Nanopositioning and Nanomeasuring Machine

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