Triple Beam Interferometer


Triple-Beam Interferometer (3DOF):

Three laser interferometer included in one unit detect three different length values independently. So it is possible to measure the position and two angles or difference values simultaneously.



  • Simultaneous measurement of length, pitch and yaw angle
  • Straightness measurement on guides and axes with angle test procedure acc. DIN ISO 230-1 in only one step (without any modification)
  • Calibration software for displaying the results
  • Correction of measurement errors according Abbe offset possible
  • Detection of the tilt center position

SP-TR Series

  • The sensor head may be made of aluminium, stainless steel or invar
  • Open interfaces for OEM software under Windows and Linux

Technical Data:

  • Measurement range: up to 2 m with plane mirror
  • Beam distance: 12 mm
  • Angle resolution: 0.002 arcsec
  • Angle measurement with cat-eye reflector: until ±12.5°
  • Data Sheet

For more information contact us