Single-beam, high precision interferometer with plane-mirror, ball or hollow reflector:
Single laser beam with the same optical path for the reflected measuring beam.
Benefits:
Best linearity
Measurement also through small windows
In case of using plane mirrors a lateral movement of the mirror or of the interferometer orthogonal to the measuring axis is possible.
In case of using ball or hollow reflectors with high tilting invariance the adjustment of the interferometer is very easy. The measuring distance is increased compared to the mirror reflector.
